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[1]吴　慰,张　琼,苏　轼,等.激光化学气相沉积法制备YBa2Cu3O7-δ超导薄膜[J].武汉工程大学学报,2018,40(05):514-523.[doi:10. 3969/j. issn. 1674-2869. 2018. 05. 008]
　WU Wei,ZHANG Qiong,SU Shi,et al.Preparation of YBa2Cu3O7-δ Superconductor Filmby Laser Chemical Vapor Deposition[J].Journal of Wuhan Institute of Technology,2018,40(05):514-523.[doi:10. 3969/j. issn. 1674-2869. 2018. 05. 008]
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激光化学气相沉积法制备YBa2Cu3O7-δ超导薄膜(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
40
期数:
2018年05期
页码:
514-523
栏目:
材料科学与工程
出版日期:
2018-12-27

文章信息/Info

Title:
Preparation of YBa2Cu3O7-δ Superconductor Filmby Laser Chemical Vapor Deposition
文章编号:
20180508
作者:
吴　慰; 张　琼; 苏　轼; 赵　培*
武汉工程大学材料科学与工程学院，湖北 武汉 430205
Author(s):
WU Wei; ZHANG Qiong; SU Shi; ZHAO Pei*
School of Materials Science and Engineering，Wuhan Institute of Technology， Wuhan 430205， China
关键词:
激光化学气相沉积法; YBa2Cu3O7-δ; 超导薄膜; 显微结构
Keywords:
laser chemical vapor deposition; YBa2Cu3O7-δ; superconductor thin film; microstructure
分类号:
TM26
DOI:
10. 3969/j. issn. 1674-2869. 2018. 05. 008
文献标志码:
A
摘要:
采用激光化学气相沉积法在（100）取向Al2O3衬底上制备了第二代高温超导YBa2Cu3O7-δ（YBCO）薄膜，研究了前驱体Y（DPM）3、Ba（DPM）2、Cu（DPM）2的蒸发温度对YBCO薄膜成分的影响规律。通过X射线衍射、扫描电子显微镜、背散射电子显微镜对薄膜进行了表征。结果表明：制备的YBCO薄膜样品成分中含有以下化合物：YBCO、CuYO2、Cu2O、Cu4O3、Y2O3、CuO、CuBaO2、BaY2O4、Ba2Cu3Ox。在激光功率为130 W，沉积温度为1 123 K，腔体压强为1 kPa，前驱体蒸发温度分别为TY=453 K、TBa=603 K和TCu=453 K的条件下制得成分较单一的c-轴取向YBCO薄膜。同时结果表明载流气Ar气的流速对薄膜成分存在一定影响。
Abstract:
The YBa2Cu3O7-δ（YBCO） thin films of the second generation high temperature superconductor were prepared on （100）-oriented Al2O3 substrates by laser chemical vapor deposition. Influences of the evaporation temperatures of precursors ［Y（DPM）3，Ba（DPM）2 and Cu（DPM）2］ on composition of YBCO film was studied. The films were characterized by X-ray diffraction，scanning electron microscopy and backscattered electron microscopy. And the results showed that the film samples contained the compounds of YBCO，CuYO2，Cu2O，Cu4O3，Y2O3，CuO，CuBaO2，BaY2O4 and Ba2Cu3Ox. Relatively pure c-axis-oriented YBCO films were prepared at laser power of 130 W，deposition temperature of 1 123 K，total pressure of 1 kPa and precursors evaporation temperatures of TY=453 K，TBa=603 K，TCu=453 K respectively. Simultaneously，the components of YBCO films were influenced by the velocity of carrier gas Ar.

参考文献/References:

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更新日期/Last Update: 2018-10-23