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[1]熊礼威,崔晓慧,汪建华,等.星形微波等离子体化学气相沉积装置上类金刚石薄膜的制备[J].武汉工程大学学报,2013,(11):53-58.[doi:103969/jissn16742869201311012]
　XIONG Li\|wei,CUI Xiao\|hui,WANG Jian\|hua,et al.Diamond\|like carbon films deposited on star\|shape microwave plasma enhanced chemical vapor deposition equipment[J].Journal of Wuhan Institute of Technology,2013,(11):53-58.[doi:103969/jissn16742869201311012]
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星形微波等离子体化学气相沉积装置上类金刚石薄膜的制备(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2013年11
页码:
53-58
栏目:
资源与土木工程
出版日期:
2013-11-30

文章信息/Info

Title:
Diamond\|like carbon films deposited on star\|shape microwave plasma enhanced chemical vapor deposition equipment
文章编号:
16742869(2013)11005306
作者:
熊礼威1; 崔晓慧1; 汪建华1; 翁俊1; 龚国华1; 张林2
1． 武汉工程大学材料科学与工程学院，湖北省等离子体化学与新材料重点实验室，湖北 武汉 430074；2． 广东生之源数码电子股份有限公司，广东 佛山 528234
Author(s):
XIONG Li\|wei1; CUI Xiao\|hui1; WANG Jian\|hua1; WENG Jun1; GONG Guo\|hua1; ZHANG Lin2
1.Hubei Provincial Key Laboratory of Plasma Chemistry & Advanced Materials, Wuhan Institute of Technology, Wuhan 430074, China;2.Guangdong Health Digital Electronics Co., Ltd., Foshan 528234 China
关键词:
类金刚石薄膜; 石英玻璃; 红外透光率
Keywords:
diamond\|like carbon film;  quartz glass;  infrared transmittance
分类号:
TQ174.1+5
DOI:
103969/jissn16742869201311012
文献标志码:
A
摘要:
以甲烷、氢气和氧气为反应气体，分别在镜面抛光的单晶硅片和石英玻璃基片上制备了类金刚石薄膜，并用扫描电子显微镜、激光拉曼光谱和傅立叶红外透射光谱仪等测试方法对薄膜的表面形貌、质量和光学性能进行了表征；通过对类金刚石（DLC）薄膜制备过程中碳源浓度、基片温度等参数的研究，掌握了工艺参数对薄膜性能的影响规律，并在此基础上成功地对薄膜的沉积工艺进行了优化.结果表明，当反应气体中的流量配比为甲烷∶氢气∶氧气=10∶100∶1，腔体压力和基片温度分别为0.5 kPa和400 ℃，制备出的DLC薄膜表面光滑平整，薄膜中的纳米金刚石特征峰明显，在石英玻璃上沉积的DLC薄膜在3 000~4 000 cm-1波数区间透光率超过80%，达到了光学应用要求.
Abstract:
Diamond\|like carbon (DLC) films were deposited on the star\|shape microwave plasma enhanced chemical vapor deposition equipment. By using methane, hydrogen and oxygen as the reactive gases, DLC films were deposited on mirror\|polished monocrystalline silicon and quartz glass substrates. Scanning electron microscope, raman spectroscopy and fourier transform infrared spectrometer were used to detect the surface morphology, quality and the optical properties of DLC films. The parameters during the deposition process such as the methane concentration and the substrate temperature were systematically studied. Results show that the smoother surface and the more obvious nanodiamond characteristic peak of DLC films are obtained when the flow rate ratio of the reactant gas is methane∶hydrogen∶oxygen=10∶100∶1, and the chamber pressure and temperature of the substrate are respectively 0.5 kPa and 400 ℃. Transmittance of DLC films in the wave range of 3 000 cm-1 to 4 000 cm-1 deposited on quartz glass is more than 80%, which is adaptive for the optic application.

参考文献/References:

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相似文献/References:

[1]谢鹏,汪建华,王传新,等.射频等离子体制备类金刚石薄膜及其表征[J].武汉工程大学学报,2009,(03):60.
　XIE Peng,WANG Jian hua,WANG Chuan xin,et al.Preparation and characteristics of diamondlike carbon films prepared by RFPECVD[J].Journal of Wuhan Institute of Technology,2009,(11):60.

备注/Memo

备注/Memo:
收稿日期：20130919基金项目：国家自然科学基金项目（No11175137）；湖北省教育厅科学技术研究项目（NoQ20121501）；武汉工程大学科学研究基金（No11111051）作者简介：熊礼威（1983\|），男，湖北仙桃人，博士，硕士研究生导师.研究方向：低温等离子体技术及新型功能材料制备.
更新日期/Last Update: 2013-12-03