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[1]陈朋,满卫东,吕继磊,等.掺硼多晶金刚石膜电极的电化学研究[J].武汉工程大学学报,2010,(12):69-72.[doi:10.3969/j.issn.1674]
　CHEN Peng,MAN Wei dong,LV Ji lei,et al.Fabrication and electrochemical properties of borondoped diamond thinfilm[J].Journal of Wuhan Institute of Technology,2010,(12):69-72.[doi:10.3969/j.issn.1674]
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掺硼多晶金刚石膜电极的电化学研究(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2010年12期
页码:
69-72
栏目:
材料科学与工程
出版日期:
2010-12-31

文章信息/Info

Title:
Fabrication and electrochemical properties of
borondoped diamond thinfilm
文章编号:
16742869(2010)12006904
作者:
陈朋1; 满卫东1; 2; 吕继磊1; 朱金凤1; 董维1; 汪建华1; 2

1.武汉工程大学湖北省等离子体化学与新材料重点实验室,湖北

武汉 430074;
2.武汉工程大学绿色化工过程省部共建教育部重点实验室,
湖北省新型反应器与绿色化学工艺重点实验室,湖北 武汉 430074

Author(s):

CHEN Peng1;  MAN Weidong1; 2;  LV Jilei1;  ZHU Jin

feng1;  DONG Wei1;  WANG Jianhua1; 2

1.Provincial Key Laboratory of Plasma Chemistry and

Advanced Materials,
Wuhan Institute of Technology,Wuhan 430074,China;
2.Key Laboratory for Green Chemical Process of Ministry

of Education,Wuhan Institute of Technology,
Hubei Novel Reactor and Green Chemical Technology key

Laboratory,Wuhan 430074, China

关键词:
化学气相沉积;  掺硼金刚石膜;  电化学;  循环伏安法
Keywords:

CVD;  borondoped diamond(BDD)film; 

electrochemical;  cyclic voltammetry

分类号:
O472;O646
DOI:
10.3969/j.issn.1674
文献标志码:
A
摘要:

通过MPCVD法在高掺杂硅衬底上生长掺硼金刚石膜（BDD）,

并用四探针,扫描电镜,激光拉曼,电化学工作站对其进行了检测,发

现所制备的掺硼金刚石膜电导率达10-2Ω·cm,同时发现金刚石膜

质量因硼原子的掺入而有所下降,采用循环伏安法研究其电化学性

质,结果表明,与Pt电极相比（1.8V和-1×10-3~3×10-4A）,BDD具

有很宽的电化学窗口(~3.2 V),较低的背景电流(-3×10-6~2×10

-6A),在铁氰化钾电解液中,表面所进行的电化学反应具有较好的准

可逆性,在对有机物苯酚的催化氧化检测中发现：与Pt电极相

比,BDD电极氧化能力强,且氧化产物简单、彻底,因此可以作为一种

理想的电极材料.

Abstract:

Borondoped diamond(BDD)film on the heavily

doped silicon substrate was prepared by the microwave

plasma chemical vapor deposition. The electrochemical

properties of BDD were characterized by resistivity

measurement by 4point probe method ,SEM,Raman

spectroscopy and electrochemistry working station. The

resistivity of diamond films is 10-2 Ω·cm,

Meanwhile,the quality of the diamond films was

deteriorated with the increasing of boron doped. The

electrochemical properties of the electrode were

investigated using cyclic voltammetry. The results

showed that BDD electrode had a very wide potential

window(~3.2 V)and very low background current (-3×10-

6~2×10-6 A),comparing with Pt electrode（1.8 V and -1×

10-3~3×10-4 A）. In electrolyte including

Ferri/Ferrocyanide, the electrochemical reaction was

carried out on the surface with good quasi

reversibility. Studies of the oxidation of organic

compounds showed that,compared with Pt electrode, the

diamond electrode could oxidate phenol ,and the process

of oxidation was very simple and complete.

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备注/Memo

备注/Memo:

收稿日期：20100726基金项目：湖北省自然科学

基金（2008CDB255）；湖北省教育厅Q20081505项目的支持作者简

介：陈朋（1985）,男,山西长治人,硕士.研究方向：微波等离子体

制备掺硼金刚石膜及其应用.通讯作者：满卫东,男,博士,副教授.

研究方向：微波等离子体制备金刚石膜及其应用.

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