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[1]谢鹏,汪建华*,王传新,等.热丝CVD法制备金刚石管[J].武汉工程大学学报,2008,(01):73-75.
　XIE Peng,WANG Jian hua,WANG Chuan xin,et al.The synthesis of diamond tubes by HFCVD[J].Journal of Wuhan Institute of Technology,2008,(01):73-75.
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2008年01期
页码:
73-75
栏目:
材料科学与工程
出版日期:
2008-01-30

文章信息/Info

Title:
The synthesis of diamond tubes by HFCVD
文章编号:
10044736(2008)01007303
作者:
谢鹏; 汪建华*; 王传新; 熊军
武汉工程大学湖北省等离子体化学与新材料重点实验室，武汉 430074
Author(s):
XIE Peng;  WANG Jianhua;  WANG Chuanxin;  XIONG Jun
Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province,Wuhan Institute of Technology, Wuhan 430074, China
关键词:
金刚石薄膜; 金刚石管; 热丝化学气相沉积法
Keywords:
diamond films;  diamond tubes;  hotfilament chemical vapor deposition (HFCVD)
分类号:
TB 43
DOI:
-
文献标志码:
A
摘要:
以钨丝作为基体，用氢气和丙酮作为反应气体，在热丝化学气相沉积装置中制备出了金刚石管，其生长速度达到了4 μm/h.扫描电镜和激光拉曼光谱的测试结果表明制备出的金刚石管质量较好.
Abstract:
Tungsten wires were used as templates for the deposition of diamond tubes. A hotfilament chemical vapor deposition (HFCVD) system fed with hydrogen and acetone was used. A relatively high deposition rate of 4 μm/h was obtained. The surface morphology and quality of deposited diamond tubes were tested by Scanning Electron Microscopy (SEM) and Laser Raman Spectroscopy (Raman). The results showed that the morphology and the microtexture of diamond tubes were very good.

参考文献/References:

［1］Angus J C, Hayman C C. Selective Patterned Deposition of Diamond using a New Technique［J］. Science, 1988, 241:913915.
［2］Yarborough W A, Messier R. Microcrystalline diamond and nanocarbon structures produced using a high argon concentration in hotfilament chemical vapor deposition［J］. Science, 1990, 241: 688690.
［3］Baranauskas V, Ceragioli H J, Peterlevitz A C, et al. Development of tubes of microcrystalline diamond and diamondlike carbon［J］. Thin Solid Films, 2001, 398:250254.
［4］高旭辉，魏俊俊，吕反修. 微波等离子体化学气相沉积法制备金刚石管及其表征［J］. 电子显微学报，2005, 24(4):383383.
［5］王传新，汪建华，满卫东. 金刚石薄膜生长速度研究［J］. 功能材料与器件学报, 2005, 11 (4):427430.

相似文献/References:

[1]湛玉龙,付秋明,马志斌*.MPCVD法AlN基体上金刚石薄膜的制备[J].武汉工程大学学报,2011,(01):54.[doi:10.3969/j.issn.16742869.2011.01.014]
　ZHAN Yu long,FU Qiu ming,MA Zhi bin.Preparation of diamond film on AlN substrate by MPCVD[J].Journal of Wuhan Institute of Technology,2011,(01):54.[doi:10.3969/j.issn.16742869.2011.01.014]

备注/Memo

备注/Memo:
收稿日期：20061009
基金项目：湖北省高等学校优秀中青年科技创新团队资助项目（2004）
作者简介：谢鹏（1984），男，湖北武汉人，硕士研究生. 研究方向：低温等离子体与新材料技术. *通讯联系人
汪建华，男，博士，教授，博士生导师.研究方向：低温等离子体与新材料技术.
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